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Scrubber

Thermal Wet Type Scrubber (PSHW-400)

Dimension(mm) : 740(W)×790(D)×1,735(H)
Capacity : 400 SLM for 8″ Wafer
No Powder Accumulation Problem
Minimal Maintenance Requirement and Easy Maintenance
Corrosion Resistant Technology and Material
Reduction of Water Consumption by Circulation

 

 

Dry Type Scrubber (PSOD-200)

Dimension(mm) : 680(W)×660(D)×1,500(H)
Capacity : 200 SLM
Longer lifetime chemical resin.
Minimal Maintenance Requirement and Easy Maintenance
Corrosion Resistant Technology and Material
Easy to replace the column
Color detector installed at the end of canister

 

Wet Type Scrubber (PSOW-200)

Plazma Type Scrubber (PSPW-600CE)