Gas/ Chemical Cabinets

Gas Supply System which are using for the toxic/flammable/Corrosive/Inert gases from semiconductor or LCD

Safety Design (Enclosure)
STS 316L VIM/VAR Materials
Applied material according to specified gas
100% Electro polished Internal Surfaces
Particle Free
Leakage Rate: 1 x 10 – 10 Atm-cc/sec (He)
PLC Controller & Touch Panel
Easy Operational and Maintenance
Full Auto Cycle Process
Auto Cylinder Change Process
Safety Option & Interlocks
Free Voltage
Display : EL Mono or TFT Color
COM : RS-232C 422, 485, Ethernet Communication

Gas Supply System which are using for the toxic/flammable/Corrosive/Inert gases from semiconductor or LCD

Increase productivity by gas down time zero base
Cut down expense by lessening the number of the gas cabinet
System & Safety option same as gas cabinet
Simple design
Full Auto, Semi Auto or Manual Operation
1 X 4, 1X6, 1X8 supply out
With Purge, With Vent(Option)

 

 

 

 

Controller for G.C/G.R/BSGS

Free Volt Main Power
PLC Process
Touch Panel Operation
Display : EL Mono or TFT Color
COM : RS-232C 422, 485, Ethernet Connection with GMS
Box Size W796 x D330 x H315
Z-Purge