Mass Production Type Furnace
Horizontal Furnace (Diffusion & LPCVD, 4inch~6inch)

Refurbish & Modification Vertical Furnace

TEL Vertical Furnace
KE Vertical Furnace
AG/RTP Furnace

KE/TEL Vertical Furnace Spare Parts
RTP Parts
Horizontal Furnace Spare Parts
All of SUS Parts (Drawing & Design)
PRI Robot Overhaul & Repair
Furnace Robot Cable
Thermocouple