Company Profile  
         

 

Furnace

Mini Type Furnace
Diffusion & LPCVD, 4inch~12inch)

Mass Production Type Furnace
Horizontal Furnace (Diffusion & LPCVD, 4inch~6inch)


Refurbish & Modification Vertical Furnace

TEL Vertical Furnace
KE Vertical Furnace
AG/RTP Furnace


KE/TEL Vertical Furnace Spare Parts
RTP Parts
Horizontal Furnace Spare Parts
All of SUS Parts (Drawing & Design)
PRI Robot Overhaul & Repair
Furnace Robot Cable
Thermocouple